Radio frequency (RF) system with embedded RF signal pickups

A radio frequency (RF) system comprising:

• a first conductive covering surface, a portion of the first conductive covering surface comprising a portion of a first outer wall of a first RF device;
• a second conductive covering surface aligned to the first conductive covering surface, the second conductive covering surface being disposed around an insulating hole;
• the insulating hole for an RF center conductor extending through the first conductive covering surface and the second conductive covering surface, the first conductive covering surface and the second conductive covering surface being disposed around the insulating hole;
• a cavity bounded by the first conductive covering surface and the second conductive covering surface, the cavity being an insulating region;
• and
• an RF signal pickup disposed within the cavity.

A radio frequency (RF) system comprising:

• a first conductive covering surface, a portion of the first conductive covering surface comprising a portion of a first outer wall of an impedance matcher circuit;
• a second conductive covering surface aligned to the first conductive covering surface, the second conductive covering surface being disposed around an insulating hole, the second conductive covering surface being a region of an outer wall of a plasma chamber;
• the insulating hole for an RF center conductor extending through the first conductive covering surface and the second conductive covering surface, the first conductive covering surface and the second conductive covering surface being disposed around the insulating hole;
• a cavity bounded by the first conductive covering surface and the second conductive covering surface, the cavity being an insulating region;
• and
• an RF signal pickup disposed within the cavity.