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US 12,224,089 B2Granted
Thin film resistor
AssigneeGlobalfoundries Singapore Pte. Ltd.
InventorsChuan Wang, Chim Seng Seet, Yudi Setiawan
Life of this patent
Estimating the term…
Abstract
The present disclosure relates to semiconductor structures and, more particularly, to a thin film resistor and methods of manufacture. A structure includes: a thin film resistor having an opening and being between an upper insulator material and a lower insulator material; and a contact extending through the opening in the thin film resistor and into the lower insulator material.
Claims19
A structure comprising:
- a thin film resistor comprising an opening and being between an upper insulator material and a lower insulator material;
- and
- a contact extending through the opening in the thin film resistor and into the lower insulator material, wherein a sidewall of the contact physically contacts ends of the thin film resistor within the opening.
A structure comprising:
- a lower insulator material comprising a gouge;
- a thin film resistor comprising an opening aligned with the gouge of the lower insulator material;
- an upper insulator material comprising an opening aligned with the gouge of the lower insulator material and the opening of the thin film resistor;
- and
- a contact extending through the openings of the thin film resistor and the upper insulator material and the gouge of the lower insulator material, the contact physically contacting ends of the thin film resistor within the opening of the thin film resistor.
2 more elements
A method comprising:
- forming a thin film resistor on a lower insulator material;
- forming an upper insulator material on the thin film resistor;
- forming a trench into the upper insulator material, through the thin film resistor and into the lower insulator material below the thin film resistor;
- forming a barrier liner on sidewalls of the trench, with the barrier liner contacting an upper surface of the thin film resistor and ends of the thin film resistor.
1 more element
Dependencies are inferred from the claim text.