Data acquisition in charged particle microscopy

A charged particle microscope support apparatus, comprising:

• first logic to cause a charged particle microscope to generate a single image of a first portion of a specimen;
• second logic to generate a first mask based on one or more regions-of-interest indicated by user annotation of the single image, wherein the regions-of-interest include a feature-of-interest in the specimen;
• and
• third logic to train a machine-learning computational model using the single image and the one or more regions-of-interest;
• wherein:
• the first logic is to cause the charged particle microscope to generate an image of a second portion of the specimen, wherein the second portion of the specimen is proximate to the first portion of the specimen;
• and
• the second logic is to, after the machine-learning computational model is trained using the single image and the one or more regions-of-interest, generate a second mask based on the image of the second portion of the specimen using the machine-learning computational model, wherein the second mask indicates to image regions of the second portion of the specimen including the feature-of-interest and regions of the second portion of the specimen that do not include the feature-of-interest.