Inspection apparatus, measuring method, and computer readable medium for acquiring point cloud data of good quality in performing measurement of a member to be inspected using a three-dimensional sensor

A measuring method comprising:

• by a three-dimensional sensor adapted to acquire point cloud data based on at least amplitude information of light, irradiating a member to be inspected with a beam and acquiring the point cloud data;
• identifying a predetermined direction in which there are a largest number of the point cloud data in a reference coordinate system being coordinate axes for the member to be inspected;
• and
• determining a tilt amount for changing an arrangement with respect to the reference coordinate system so that a number of the point cloud data in the predetermined direction increases in an eigen coordinate system being coordinate axes for the three-dimensional sensor.

A non-transitory computer-readable medium storing a program for causing a computer to:

• cause a three-dimensional sensor adapted to acquire point cloud data based on at least amplitude information of light to irradiate-a member to be inspected with a beam and acquiring the point cloud data;
• identify a predetermined direction in which there are a largest number of the point cloud data in a reference coordinate system being coordinate axes for the member to be inspected;
• and
• determine a tilt amount for changing an arrangement with respect to the reference coordinate system so that number of the point cloud data in the predetermined direction increases in an eigen coordinate system being coordinate axes for the three-dimensional sensor.