Generation method, estimation method, generator, and estimator

A generator comprising:

• a processor;
• and
• a memory storing instruction and that is connected to the processor, wherein
• the processor is configured to, by executing the instructions in the memory,
• perform an experiment of a processing operation on a device in order to acquire type 1 information, type 2 information, type 3 information, and type 4 information, if the performed experiment is a simulation experiment the type 1 information and the type 2 information each indicating estimated processing conditions associated with the device during the processing operation, and the type 3 information and the type 4 information each indicating estimated results of the processing operation performed on the device, and if the performed experiment is an actual machine experiment, the type 1 information and the type 2 information each indicating actual processing conditions associated with the device during the processing operation, and the type 3 information and the type 4 information each indicating actual results of the processing operation performed on the device,
• derive a first statistical model equation expressing a first mathematical relationship between the type 1 information, the type 2 information, and the type 3 information, and derive a second statistical model equation expressing a second mathematical relationship between the type 1 information, the type 2 information, and the type 4 information, and
• generate and output an estimation model that estimates information indicating a target result of an inline the processing operation performed on the device by using the first statistical model equation and the second statistical model equation with the type 2 information and the type 3 information as inputs,
• wherein the information output by the estimation model is used to perform the inline processing operation in a manufacturing environment that is not the experiment in order to achieve the target result.