Squeezing device, photoresist supply system and photoresist supply method

Abstract

Embodiments of the present application provide a squeezing device, a photoresist supply system, and a photoresist supply method. The squeezing device includes: a base, configured to bear a photoresist bottle; a support rail, vertically arranged on the base; a squeezing structure, an end of the squeezing structure is movably arranged on the support rail so that the squeezing structure moves up and down along the rail direction of the support rail; and a driving module, configured to drive the squeezing structure to deform the squeezing structure so as to reduce the area of a region enclosed by the squeezing structure, and also configured to drive the deformed squeezing structure so that the squeezing structure moves up and down along the rail direction of the support rail. By squeezing the photoresist bottle by the squeezing device, the utilization rate of the photoresist in the photoresist bottle is improved.

Dependencies are inferred from the claim text.