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US 12,222,646 B2Granted
Polypeptide, photoresist composition including the same, and method of forming pattern using the same
AssigneeSamsung Electronics Co., Ltd.
InventorsJinha Kim, Soonchun Chung, Jieun Kim, Joonsong Park
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Abstract
A polypeptide, a photoresist composition including the polypeptide, and a method of forming patterns by using the photoresist composition.
Claims6
A polypeptide comprising a region A, a region B, and a region H;
- wherein:
- the region A has an alanine content of 20% or more, and includes at least one first repeat unit having 4 to 6 consecutive amino acid residues, wherein the first repeat unit is represented by Formula 1:
- X11-(Ala-X12)n11—X13;
- Formula 1
- wherein X11 and X12 are each independently Gly or Ala,
- X13 is Ser, and
- n11 is 1 or 2;
- the region B has a tyrosine content of 10% or more, a content of 5% or more of at least one of serine, threonine, asparagine, or glutamine, and includes at least one second repeat unit including 4 to 8 consecutive amino acid residues, wherein the second repeat unit is represented by Formula 2:
- X21—(X22—X23)n21—(X24—X25)n22-Tyr;
- Formula 2
- wherein X21 and X23 are each Gly,
- X22 and X24 are each independently Ala or Val,
- X25 is Ser, Thr, Asn, or Gln,
- n21 is an integer of 0 to 2, and
- n22 is 1;
- and
- the region H comprises Gly-Ala-Ala-Ser (SEQ ID NO:
- 8);
- wherein the polypeptide has a molecular weight of 10,000 g/mol or less.
16 more elements
Dependencies are inferred from the claim text.