Lithium niobate waveguide having weak phase drift
OwnerHanxiao Liang, Yipin Song +6inventors
InventorsHanxiao Liang, Yipin Song, Yingcong Zhou, Haicang Wu, Wenhao Mao, Shiwei Song, Weiqi Sun, Qingyang Yu
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OwnerHanxiao Liang, Yipin Song +6inventors
InventorsHanxiao Liang, Yipin Song, Yingcong Zhou, Haicang Wu, Wenhao Mao, Shiwei Song, Weiqi Sun, Qingyang Yu
Estimating the term…
A lithium niobate waveguide having weak phase drift includes a lithium niobate layer, a metal electrode, and a substrate layer. The lithium niobate layer includes a lithium niobate central ridge and lithium niobate extension surfaces extending towards two sides of the lithium niobate central ridge. A metal oxide layer is arranged on the upper surface of the lithium niobate central ridge. The substrate layer is located on the lower surface of the lithium niobate layer and is made of silicon, silicon dioxide, a multilayer material made of silicon and silicon dioxide or a multilayer material made of silicon dioxide, metal, and silicon, so as to further realize the purpose of inhibiting phase drift. Compared with other doped structures or other structures, the structure is simple in manufacturing method, and moreover, a very good phase drift suppression effect is achieved.
A lithium niobate waveguide having weak phase drift, comprising:
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