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US 12,222,566 B2Granted
Self-aligned structure and method on interposer-based PIC
AssigneePOET Technologies, Inc.
InventorSuresh Venkatesan
Life of this patent
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Abstract
Alignment aid structures and the method of formation of these structures on an interposer comprised of a planar waveguide layer and a base structure, facilitate the alignment of the optical axes of optical and optoelectrical devices formed from and mounted to the interposer. Alignment aids formed from a common hard mask on the planar waveguide layer of the interposer structure include vertical and lateral alignment structures and fiducials. Optical losses for signals propagating in interposer-based photonic integrated circuits are reduced with effective alignment structures and methods.
Claims20
A structure comprising
- a substrate;
- a first optical component on the substrate,
- wherein the first optical component comprises a first optical axis;
- a first alignment aid element comprising a first outer surface parallel to a lateral surface of the substrate,
- wherein the first outer surface is separated by a first distance with the first optical axis;
- wherein the first alignment aid element is configured for aligning a second optical component with the first optical component in a first direction perpendicular to the lateral surface,
- a second alignment aid element comprising a pattern on a second surface parallel to the lateral surface,
- wherein the second surface is in a vicinity of the first optical axis in the first direction,
- wherein the pattern is configured for laterally aligning a second optical component with the substrate;
- a third alignment aid element comprising a third surface not parallel to the lateral surface,
- wherein the third surface is configured to constrain or guide movements of the second optical component in a second direction parallel to the lateral surface.
8 more elements
A structure comprising
- a substrate;
- a first optical component on the substrate,
- wherein the first optical component comprises a first optical axis;
- a first alignment aid element comprising a first outer surface parallel to a lateral surface of the substrate,
- wherein the first outer surface is separated by a first distance with the first optical axis in a first direction perpendicular to the lateral surface,
- wherein the first distance is configured to match with a second distance between a second outer surface and a second optical axis of a second optical component in a second direction perpendicular to the second outer surface,
- wherein the first alignment aid element is configured for aligning the second optical component with the first optical component in the first direction, characterized by aligning the first optical axis with the second optical axis in the first direction, when the second component is assembled on the substrate with the first outer surface contacting with the second outer surface,
- wherein the first alignment aid element further comprises a third surface not parallel to the lateral surface,
- wherein the third surface is configured to constrain or guide movements of the second optical component in a third direction parallel to the lateral surface;
- a second alignment aid element comprising a pattern on a second surface parallel to the lateral surface,
- wherein the second surface is in a vicinity of the first optical axis in the first direction,
- wherein the pattern is configured for aligning the second optical axis of the second optical component with the first optical axis of the first optical component in the third direction.
9 more elements
A structure comprising
- a substrate;
- a first optical component on the substrate,
- wherein the first optical component comprises a first optical axis;
- a first alignment aid element comprising a first outer surface parallel to a lateral surface of the substrate,
- wherein the first outer surface is separated by a first distance with the first optical axis in a first direction perpendicular to the lateral surface,
- wherein the first distance is configured to match with a second distance between a second outer surface and a second optical axis of a second optical component in a second direction perpendicular to the second outer surface,
- wherein the first alignment aid element is configured for aligning the second optical component with the first optical component in the first direction, characterized by aligning the first optical axis with the second optical axis in the first direction, when the second component is assembled on the substrate with the first outer surface contacting with the second outer surface;
- a second alignment aid element comprising a fiducial pattern on a second surface parallel to the lateral surface,
- wherein the second surface is in a vicinity of the first optical axis in the first direction,
- wherein the fiducial pattern is separated by a third distance with the first alignment aid element in a third direction parallel to the lateral surface,
- wherein the third distance is configured for a precision placement of the second optical component on the first alignment aid element for aligning the second optical axis of the second optical component with the first optical axis of the first optical component in the third direction with a placement accuracy of a lithographic process;
- a third alignment aid element comprising a third surface not parallel to the lateral surface,
- wherein the third surface is configured to constrain or guide movements of the second optical component in the third direction during a soldering aligning process.
10 more elements
Dependencies are inferred from the claim text.