Microelectromechanical device having a structure tiltable by piezoelectric actuation about two rotation axes
AssigneeSTMicroelectronics S.r.l.
InventorsNicolo' Boni, Roberto Carminati, Massimiliano Merli
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AssigneeSTMicroelectronics S.r.l.
InventorsNicolo' Boni, Roberto Carminati, Massimiliano Merli
Estimating the term…
A microelectromechanical device includes a fixed structure having a frame defining a cavity, a tiltable structure elastically suspended above the cavity with main extension in a horizontal plane, a piezoelectrically driven actuation structure which can be biased to cause a desired rotation of the tiltable structure about a first and second rotation axes, and a supporting structure integral with the fixed structure and extending in the cavity starting from the frame. Lever elements are elastically coupled to the tiltable structure at a first end by elastic suspension elements and to the supporting structure at a second end by elastic connecting elements which define a lever rotation axis. The lever elements are elastically coupled to the actuation structure so that their biasing causes the desired rotation of the tiltable structure about the first and second rotation axes.
A microelectromechanical device, comprising:
A microelectromechanical device, comprising:
Dependencies are inferred from the claim text.