Chip type coil-based fluxgate current sensor

A chip type coil-based fluxgate current sensor, comprising a magnetism gathering iron core, a chip type coil, an integral filtering module, a signal driving module, a voltage acquisition module, and a signal amplification module which are connected in sequence;

• the chip type coil comprises a first high-resistance silicon wafer and a second high-resistance silicon wafer which are bonded with each other;
• a built-in cavity is formed between involution surfaces of the first high-resistance silicon wafer and the second high-resistance silicon wafer, and multiple solenoid cavities filled with coil materials are provided around a periphery of the cavity;
• a cavity opening is formed at one end after involution of the first high-resistance silicon wafer and the second high-resistance silicon wafer;
• the magnetism gathering iron core is inserted into the cavity of the chip type coil by means of the cavity opening;
• further comprising a feedback coil and a self-excited oscillation circuit module;
• the feedback coil is used for generating a magnetic field opposite to a magnetic field generated by a primary-side current, and feeding the generated magnetic field back to the magnetism gathering iron core;
• the self-excited oscillation circuit module is used for detecting a current of the chip type coil, reversing square waves of the chip type coil, and driving the chip type coil;
• the integral filtering module is used for receiving a voltage signal output after the chip type coil senses a detected magnetic field, and processing the voltage signal to obtain a corresponding current signal.