Probe head and probe card having same
AssigneePoint Engineering Co., Ltd.
InventorsBum Mo Ahn, Seung Ho Park, Sung Hyun Byun
Life of this patent
Estimating the term…
Abstract
A probe head and a probe card having the same are provided. The probe head includes a plurality of guide plates each having a guide hole, wherein each of the guide plates has a shape in which a plurality of layers are stacked, and each of the guide plates includes: a first guide layer provided at a lowermost side thereof, and having a first guide hole; and a second guide layer provided at an uppermost side thereof, and having a second guide hole, wherein a side wall of the first guide hole and a side wall of the second guide hole are not provided on the same vertical line.
Claims5
A probe head of a probe card, the probe head comprising:
- a plurality of guide plates each having a guide hole,
- wherein at least one of the guide plates has a shape in which a plurality of guide layers are stacked, and
- at least one of the guide plates comprises:
- a first guide layer provided at a lowermost side thereof, and having a first guide hole;
- and
- a second guide layer provided at an uppermost side thereof, and having a second guide hole,
- wherein a side wall of the first guide hole and a side wall of the second guide hole are not provided on a same vertical line,
- wherein the first guide layer and the second guide layer are made of an anodic aluminum oxide film formed by anodizing a metal as a base material and removing the base material,
- wherein the plurality of the guide plates comprises:
- a lower guide plate having a lower guide hole;
- and an upper guide plate provided above the lower guide plate, and having an upper guide hole,
- wherein one of the upper guide plate and the lower guide plate includes the first guide layer and the second guide layer, and
- wherein the upper guide hole and the lower guide hole have a symmetrical structure.
A probe card, comprising:
- a space transformer having a probe connection pad electrically connected to each of a plurality of probes;
- and
- a probe head provided below the space transformer, and having a plurality of guide plates having a shape in which a plurality of guide layers are stacked,
- wherein at least one of the guide plates comprises:
- a first guide layer provided at a lowermost side thereof, and having a first guide hole;
- and
- a second guide layer provided at an uppermost side thereof, and having a second guide hole,
- wherein a side wall of the first guide hole and a side wall of the second guide hole are not provided on a same vertical line,
- wherein the first guide layer and the second guide layer are made of an anodic aluminum oxide film formed by anodizing a metal as a base material,
- wherein the plurality of the guide plates comprises:
- a lower guide plate having a lower guide hole;
- and an upper guide plate provided above the lower guide plate, and having an upper guide hole,
- wherein one of the upper guide plate and the lower guide plate includes the first guide layer and the second guide layer, and
- wherein the upper guide hole and the lower guide hole have a symmetrical structure.
Dependencies are inferred from the claim text.