MEMS probe card

A MEMS probe card comprises a stiffener (1), a PCB board (2), an adapter layer (3), a guide plate (4) and a MEMS probe (5) from top to bottom;

• the stiffener (1) is used to increase the strength of MEMS probe card;
• the PCB board (2) is used to connect a testing machine and signal line;
• the adapter layer (3) is a medium between a PCB board and the MEMS probe for realizing a fixed adaptation of signals;
• the guide plate (4) is used to accommodate the MEMS probe (5);
• and the MEMS probe (5) is used to connect a tested wafer to realize testing of electrical properties of the tested wafer;
• wherein:
• the guide plate (4) and the MEMS probe (5) jointly constitute a guide plate-MEMS probe structure, and the guide plate-MEMS probe structure is made from a guide plate-MEMS probe structure template;
• the guide plate-MEMS probe structure template can be dissolved in the solution where the guide plate (4) and the MEMS probe (5) cannot be dissolved, and the guide plate-MEMS probe structure template is provided with a marker position, and the guide plate (4) is provided with a coating convex;
• the guide plate-MEMS probe structure template are made by a guide board-MEMS probe structure template etching equipment, and the guide plate-MEMS probe structure template etching equipment is successively provided with a light source (7-1), a pinhole (7-2), a collimating lens (7-3), an x-direction slit expansion plate (7-4), a y-direction slit expansion plate (7-5), a first prism (7-6), a plane mirror (7-7), a second prism (7-8), a first image sensor (7-9), a controller (7-10), and a laser array (7-11) along a direction of light propagation;
• and
• the light beam emitted by the light source (7-1) passes through pinhole (7-2) to form a point light source, and the pinhole (7-2) is located at the focus of the collimating lens (7-3);
• the point light source passes through the collimating lens (7-3) to form parallel light, and the parallel light passes through the x-direction slit expansion plate (7-4) to form an x-direction stripe array, and the x-direction stripe array passes through the y-direction slit expansion plate (7-5) to form a point array, and the point array is transmitted through the first prism (7-6), reflected by the plane mirror (7-7), reflected by the first prism (7-6), transmitted by the second prism (7-8), and incident to the first image sensor (7-9) respectively;
• the first image sensor (7-9) is electrically connected with the controller (7-10) and the controller (7-10) controls the laser array (7-11) to send out a laser beam, and the laser beam is reflected by the second prism (7-8) and the first prism (7-6) respectively and incident to the guide plate-MEMS probe structure template (6) without the plane mirror (7-7).