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US 12,222,346 B2Granted
Stable nanopores and nanopore arrays for ionic and other measurements
AssigneeThe Trustees of the University of Pennsylvania
InventorsMarija Drndic, Yung-Chien Chou
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Abstract
Provided are nanopore devices that include a hafnium oxide coating on the pores of the devices. Such devices exhibit improved stability, especially when in a salt solution environment. Also provided are related methods.
Claims23
An etch-resistant nanopore component, comprising:
- a first membrane,
- the membrane having a pore extending therethrough,
- the pore having an inner wall defined by the membrane;
- and
- a coating of hafnium oxide conforming to and surmounting at least a portion of the inner wall, and
- the pore having, inclusive of the coating of hafnium oxide, a narrowest cross-sectional dimension of from about 1 nm to about 100 nm.
3 more elements
A method, comprising:
- forming a pore extending through a membrane,
- the pore having an edge and having an inner wall defined by the membrane;
- and
- applying a hafnium oxide coating so as to conform to and surmount at least a portion of the inner wall,
- the pore having, inclusive of the coating of hafnium oxide, a narrowest cross-sectional dimension of from about 1 nm to about 100 nm.
2 more elements
Dependencies are inferred from the claim text.