Integrated circuit with BioFETs

An IC structure comprising:

• a BioFET comprising a channel region in a semiconductor layer, and a gate structure over a front side of the channel region;
• an interconnect structure over the gate structure;
• a dielectric layer having a sensing well extending through the dielectric layer to a backside of the channel region of the BioFET;
• a fluid containment region bound by a plurality of fluid channel walls disposed over the dielectric layer;
• a first heater in the semiconductor layer;
• a second heater in the interconnect structure, the second heater having a thermal conductivity lower than a thermal conductivity of metal lines in the interconnect structure;
• and
• a coating of cardiac cell binding agent over the dielectric layer, wherein one of the plurality of fluid channel walls forms an interface with the coating of cardiac cell binding agent, and an entirety of the interface vertically overlaps with the first heater in the semiconductor layer.

An IC structure comprising:

• a BioFET comprising a channel region in a semiconductor layer, and a gate structure over a front side of the channel region;
• an interconnect structure over the gate structure;
• a dielectric layer having a sensing well extending through the dielectric layer to a backside of the channel region of the BioFET;
• a fluid containment region bound by a plurality of fluid channel walls disposed over the dielectric layer;
• a first heater in the semiconductor layer;
• a temperature sensing device in the semiconductor layer;
• and
• a coating of cardiac cell binding agent over the dielectric layer, wherein one of the plurality of fluid channel walls forms an interface with the coating of cardiac cell binding agent, and an entirety of the interface vertically overlaps with the first heater in the semiconductor layer.