Semiconductor device providing a biosensor to test for pathogen

A method of making a biosensor, comprising:

• providing a first substrate;
• forming a buried oxide layer over the first substrate;
• disposing a second substrate over the buried oxide layer;
• forming a cavity through the first substrate while leaving the buried oxide layer disposed over the cavity, wherein a portion of the second substrate and buried oxide layer disposed over the cavity forms a membrane;
• forming a plurality of holes through the membrane including the second substrate and the buried oxide layer disposed over the cavity;
• and
• forming a backside contact over a surface of the substrate opposite the device layer, wherein the backside contact includes a port extending into the cavity adapted to introduce a reactive solution into the cavity.

A method of making a biosensor, comprising:

• providing a substrate;
• forming a buried oxide layer over the substrate;
• disposing a device layer over the buried oxide layer;
• forming a cavity through the substrate while leaving the buried oxide layer disposed over the cavity to form a membrane as a portion of the device layer and buried oxide layer disposed over the cavity;
• and
• forming a plurality of holes through the membrane including the device layer and the buried oxide layer disposed over the cavity.