Transmissive small-angle scattering device

A transmission type small-angle scattering device comprising:

• a goniometer including a rotation arm;
• an X-ray irradiation unit installed on the rotation arm;
• a two-dimensional X-ray detector installed on the rotation arm;
• and
• a sample holder in which a sample as an inspection target is placed, wherein
• the rotation arm is freely turnable around a θ-axis extending in a horizontal direction from an origin, with a vertical arrangement state of the rotation arm being defined as the origin,
• the sample placed in the sample holder is irradiated with focused X-rays emitted from the X-ray irradiation unit from a lower side of the sample, and the two-dimensional X-ray detector is configured to detect scatter X-rays generated around the focused X-rays transmitted through the sample at a position above the sample, and
• the transmission type small-angle scattering device further comprises an χ-axis swing mechanism for swinging the sample holder around an χ-axis, wherein the χ-axis swing mechanism is configured to change an optical axis angle of incident X-rays with respect to the sample placed in the sample holder.