X-ray inspection apparatus

An X-ray inspection apparatus comprising:

• an X-ray source configured to irradiate an article with X-rays in a plurality of energy bands;
• an X-ray detection unit capable of detecting the X-rays using a photon counting method;
• an image generation unit configured to generate (1) an overall transmission image corresponding to the X-rays in all of the plurality of energy bands, (2) a first transmission image corresponding to the X-rays in a first energy band included in the plurality of energy bands, (3) a second transmission image corresponding to the X-rays in a second energy band which is included in the plurality of energy bands and is lower than the first energy band, and (4) a difference image obtained by a subtraction process between the first transmission image and the second transmission image on the basis of a detection result of the X-rays by the X-ray detection unit;
• and
• an inspection unit configured to inspect the article on the basis of each of the difference image and at least one of the overall transmission image, the first transmission image, and the second transmission image.