Optical inspection device and inspecting method using the same
AssigneeSamsung Display Co., Ltd.
InventorsJeong Moon Lee, Dae Hong Kim, Hyung Jin Lee
Life of this patent
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Abstract
An optical inspection device includes: a barrel; a first light source unit at a first side of the barrel and configured to irradiate light of a first wavelength range through a first light path; a second light source unit at a second side of the barrel, the second side being different from the first side, and configured to irradiate light of a second wavelength range that is different from the first wavelength range through a second light path; and a camera. At least a portion of the first light path is different from the second light path.
Claims19
An optical inspection device comprising:
- a barrel forming an optical path, the barrel having a first opening at a first side of the barrel and a second opening at a second side of the barrel;
- a first light source unit adjacent to the first opening of the barrel and configured to irradiate light of a first wavelength range into the optical path in the barrel to a target to be inspected through a first light path;
- a second light source unit adjacent to the second opening of the barrel, the second side being different from the first side, and configured to irradiate light of a second wavelength range that is different from the first wavelength range into the optical path in the barrel to the target to be inspected through a second light path;
- and
- a camera configured to receive the light of the first light source unit or the second light source unit reflected by the target to be inspected through the optical path in the barrel,
- wherein at least a portion of the first light path is different from the second light path.
An optical inspection device comprising:
- a barrel having a first opening at a first side of the barrel and a second opening at a second side of the barrel;
- a first light source unit adjacent to the first opening and configured to irradiate ultraviolet or infrared light through a first light path;
- a second light source unit adjacent to the second opening and configured to irradiate visible light through a second light path, the second light source unit comprising a white light source and a color selector comprising a plurality of color filters;
- and
- a camera configured to capture an image of a target object irradiated with light from the first light source unit or the second light source unit,
- wherein at least a portion of the first light path is different from the second light path.
An inspection method using an optical inspection device, the optical inspection device comprising:
- a barrel forming an optical path, the barrel having a first opening at a first side of the barrel and a second opening at a second side of the barrel;
- a first light source unit adjacent to the first opening of the barrel and configured to irradiate ultraviolet or infrared light into the optical path in the barrel to a target object to be inspected through a first light path;
- a second light source unit adjacent to the second opening of the barrel that is different from the first side of the barrel and configured to irradiate visible light into the optical path in the barrel to the target object to be inspected through a second light path;
- and a camera configured to receive the light of the first light source unit or the second light source unit the method comprising:
- selecting the first light source unit when the target object to be inspected is a transparent film;
- selecting the second light source unit when the target object to be inspected is a colored film or an opaque film;
- capturing, by the camera, the light of the first light source unit or the second light source unit reflected by the target object to be inspected through the optical path in the barrel;
- and
- capturing, by the camera, an image of the target object to be inspected formed by the light of the selected one of the first light source unit or the second light source unit reflected by the target object to be inspected through the optical path in the barrel.
Dependencies are inferred from the claim text.