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US 12,222,281 B2Granted
Method for measuring element concentration of material
AssigneeChangxin Memory Technologies, Inc.
InventorYing-Chih Wang
Life of this patent
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Abstract
A method for measuring an element concentration of a material includes: a material sample is irradiated with first electromagnetic waves; second electromagnetic waves radiated by the material sample are obtained under the action of the first electromagnetic waves; material property parameters of the material sample are determined by detecting the second electromagnetic waves; and an element concentration of the material sample is determined according to the material property parameters.
Claims10
A method for measuring an element concentration of a material, comprising:
- irradiating a sample to be measured and one or more reference samples respectively with first electromagnetic waves, wherein the sample to be measured is a compound containing an element to be measured, each reference sample is a mixture of at least two substances, and the at least two substances comprise a substance containing the element to be measured in the sample to be measured;
- obtaining second electromagnetic waves radiated by the sample to be measured and one or more reference samples under the action of the first electromagnetic waves;
- determining material property parameters of the sample to be measured and one or more reference samples by detecting the second electromagnetic waves;
- and
- determining a reference function according to correspondences between the material property parameters of the one or more reference samples and the element concentrations of the one or more reference samples;
- determining a proportionality coefficient of each substance in each reference sample according to dielectric constants of individual substances in the reference sample and a dielectric constant of the reference sample
- determining an element content of the element to be measured in the compound according to the reference function, the material property parameters of the sample to be measured, and the proportionality coefficient.
4 more elements
A method for measuring an element concentration of a material, comprising:
- irradiating one or more reference samples with first electromagnetic waves, wherein each reference sample is a mixture of at least two substances, and the at least two substances comprise a substance containing an element to be measured, wherein the first electromagnetic waves comprise:
- at least two groups of electromagnetic waves having different wavelengths;
- obtaining second electromagnetic waves radiated by the one or more reference samples under the action of the first electromagnetic waves;
- determining material property parameters of the one or more reference samples by detecting the second electromagnetic waves;
- and
- determining a reference function according to correspondences between the material property parameters and element concentrations of the one or more reference samples, wherein the element concentration is concentration of the element to be measured in each reference sample, and the reference function is used for determining the element concentration of the element to be measured in a sample to be measured;
- wherein determining the reference function according to correspondences between the material property parameters and the element concentration of the one or more reference samples comprises:
- determining at least two relationship curves according to the material property parameters respectively obtained according to the at least two groups of electromagnetic waves having different wavelengths and corresponding element concentrations;
- and
- determining a relationship curve with a largest change rate among the at least two relationship curves as the reference function.
7 more elements
Dependencies are inferred from the claim text.