Fully decoupled three-axis MEMS gyroscope

A fully decoupled three-axis MEMS gyroscope, comprising:

• an anchor point unit, comprising:
• an anchor point subunit located at a center of a rectangle;
• and
• four side anchor points respectively located between the central anchor point subunit and four sides of the rectangle and spaced apart from the central anchor subunit;
• a driving unit coupled with a sensing unit and configured to drive the sensing unit to move, comprising:
• four driving members respectively located at four sides of the rectangle, and annularly and symmetrically arranged around a center of the rectangle;
• one end of each driving member close to the center of the rectangle is elastically connected to the central anchor point subunit;
• an avoiding interval is formed between adjacent driving members, and four side anchor points are respectively located in the avoiding intervals;
• and
• the sensing unit elastically connected to the anchor point unit, comprising:
• two X mass blocks symmetrically and oppositely arranged in two of the avoiding intervals and elastically connected to two of the driving member;
• two Y mass blocks symmetrically and oppositely arranged in the other two of the avoiding intervals and elastically connected to two of the driving member;
• four Z mass blocks respectively located on an outer side of each driving member and elastically connected to the adjacent driving member;
• and
• four Z detection decoupling members respectively located on an outer side of each Z mass block and elastically connected to the adjacent Z mass block;
• wherein the adjacent Z detection decoupling members are elastically connected;
• an end of each X mass block close to the center of the rectangular and an end of each Y mass block close to the center of the rectangular are both elastically connected to the central anchor point subunit, and a central portion of each X mass block and a central portion of each Y mass block are elastically connected to a corresponding side anchor point, respectively.