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US 12,222,198 B2Granted
Optical measurement device and multiple mirror
AssigneeHochschule Trier
InventorsMichael Schuth, Christopher Petry
Life of this patent
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Abstract
A multiple mirror for multiplying a single incident wavefront of electromagnetic radiation into a plurality of outgoing wavefronts, including at least one first mirror, onto which the incident wavefront first falls, and a second mirror, on which the wavefront is last reflected, wherein the mirror planes are superimposed in the direction of movement of the first wavefront. The first mirror is partially transparent to the electromagnetic radiation and the second mirror is fully reflective.
Claims18
A device for interferometric, optical measurement of a surface, comprising
- a coherent light source emitting an electromagnetic beam;
- two beam splitters;
- two diaphragms each located on a flat side of one of the two beam splitters;
- a multiple mirror with two distanced mirrors, comprising a first mirror to which the incoming beam hits first, and a second mirror at which the beam is reflected last, wherein the mirrors are superimposed in the direction of motion of the first wavefront and wherein the first mirror is partially transparent for the electromagnetic beam and the second mirror is fully reflective;
- and
- whereby the beam splitters and the multiple mirror are arranged in such a manner that the electromagnetic beam hits the first beam splitter, is directed from the first beam splitter to the multiple mirror and then hits the second beam splitter;
- wherein a diaphragm of the two diaphragms is arranged in the beam path between the two beam splitters in such a manner that the beam passes through the diaphragm;
- and
- wherein a mirror of the multiple mirror is tiltable compared to the other mirror in such a manner that the mirrors enclose an angle and that a wavefront hitting the multiple mirror is divided into two outgoing wavefronts that are phase-shifted with respect to each other.
6 more elements
A device for interferometric, optical measurement of a surface, comprising
- a coherent light source emitting an electromagnetic beam;
- two beam splitters;
- two diaphragms;
- a single mirror;
- a multiple mirror with two distanced mirrors, comprising a first mirror to which the incoming beam hits first, and a second mirror at which the beam is reflected last, wherein the mirrors are superimposed in the direction of motion of the first wavefront and wherein the first mirror is partially transparent for the electromagnetic beam and the second mirror is fully reflective;
- whereby the beam splitters, the single mirror and the multiple mirror are arranged in such a manner that the electromagnetic beam hits the first beam splitter, is divided by the first beam splitter in two partial beams with different propagation directions;
- wherein the first of the two partial beams is directed to the multiple mirror and then hits the second beam splitter, and the second of the two partial beams is directed to the single mirror and then hits the second beam splitter;
- wherein one diaphragm is arranged in each of the beam paths of the partial beams between the two beam splitters in such a manner that each partial beam passes through one of the diaphragms;
- and
- wherein a mirror of the multiple mirror is tiltable compared to the other mirror in such a manner that the mirrors enclose an angle and that a wavefront hitting the multiple mirror is divided into two outgoing wavefronts that are phase-shifted with respect to each other.
7 more elements
A device for interferometric, optical measurement of a surface, comprising
- a coherent light source emitting an electromagnetic beam;
- two beam splitters;
- two diaphragms;
- two multiple mirrors with two distanced mirrors, each comprising a first mirror to which the incoming beam hits first, and a second mirror at which the beam is reflected last, wherein the mirrors are superimposed in the direction of motion of the first wavefront and wherein the first mirror is partially transparent for the electromagnetic beam and the second mirror is fully reflective;
- and
- whereby the beam splitters and the multiple mirror are arranged in such a manner that the electromagnetic beam hits the first beam splitter, is divided by the first beam splitter in two partial beams with different propagation directions and each partial beam is directed to one of the multiple mirrors and then both partial beams meet the second beam splitter,
- wherein one diaphragm is arranged in each of the beam paths between the two beam splitters in such a manner that each partial beam passes through one of the diaphragms, and
- wherein a mirror of the multiple mirror is tiltable compared to the other mirror in such a manner that the mirrors enclose an angle and that a wavefront hitting the multiple mirror is divided into two outgoing wavefronts that are phase-shifted with respect to each other.
5 more elements
Dependencies are inferred from the claim text.