Robust fluid coupling apparatus

A coupling apparatus configured to seal a joint between two fluid flow components that, when joined, define an axial flow path through which a fluid can traverse, the coupling apparatus comprising:

• a gasket having an annular shape that defines an inner opening having a diameter taken along a radial plane that is perpendicular to the axial flow path, the inner opening diameter of the gasket being large enough to enable fluid to pass through the gasket, wherein the gasket inner opening extends the axial flow path;
• and
• a support component in which the gasket is arranged, the support component having an annular shape that defines an inner opening having a diameter taken along the radial plane, the inner opening diameter of the support component being larger than an outer diameter of the gasket;
• wherein, when the gasket is seated between the two fluid flow components to thereby seal the joint formed by attaching the two fluid flow components, pressure applied to the gasket from fluid traversing the gasket inner opening along the axial flow path improves the hermetic function of the seal at the joint;
• wherein, as the joint between the fluid flow components is tightened, the joint seal is initially formed between an inner radial mating surface of at least one of the fluid flow components and an outer radial mating surface of the gasket prior to the joint seal being formed along the axial direction between the fluid flow components and the gasket.

A target material supply apparatus comprising:

• first and second fluid flow components that define an axial flow path when joined together, in which the axial flow path is between a source of target material fluid and a nozzle supply apparatus and is configured to pass the target material fluid toward the nozzle supply apparatus;
• a coupling apparatus configured to seal the joint between the first and second fluid flow components, the coupling apparatus comprising a gasket made of a material other than metal or metal alloys and is compatible with and inert to the target material fluid;
• and
• a support component within which the gasket is arranged, the support component configured to provide a hard stop along the direction of the axial flow path.

A coupling apparatus configured to seal a joint between a reservoir that holds a target material fluid and an adapter configured to fluidly connect the reservoir to a nozzle supply apparatus, the coupling apparatus extending an axial flow path through which the target material fluid can traverse from the reservoir to the nozzle supply apparatus, the coupling apparatus comprising:

• a gasket having an annular shape that defines an inner opening having a diameter taken along a radial plane that is perpendicular to the axial flow path, the inner opening diameter of the gasket being large enough to enable fluid to pass through the gasket, wherein the gasket inner opening extends the axial flow path;
• and
• a functional insert that is seated within the inner opening of the gasket, the functional insert including an inner opening that is part of the axial flow path, the functional insert inner opening having a diameter that is less than the diameter of the inner opening of the gasket;
• wherein, when the gasket is seated between the reservoir and the adapter to thereby seal the joint formed by attaching the reservoir and the adapter, pressure applied to the gasket from fluid traversing the gasket inner opening along the axial flow path improves the hermetic function of the seal at the joint.