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US 12,222,039 B2Granted
Guided flow valve assembly and system incorporating same
AssigneeIchor Systems, Inc.
InventorStephen Carson
Life of this patent
Estimating the term…
Abstract
Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow frequently rely on valves which can provide flows at different rates and in a minimally turbulent manner. In one embodiment, a valve assembly is disclosed, the valve assembly having a valve body, a closure member, a seat, and a radial flow guide. The radial flow guide has a plurality of flow passages. The closure member has a needle, the needle having a plurality of grooves therein. The resulting valve assembly enables improved control of fluid and reduces turbulence in the resultant flow.
Claims23
A system for processing articles, the system comprising:
- a fluid supply configured to supply a process fluid;
- an apparatus for controlling flow, the apparatus having an inlet, an outlet, and a valve assembly, the inlet of the apparatus fluidly coupled to the fluid supply and the valve assembly fluidly coupled between the inlet and the outlet, the valve assembly comprising:
- a body, the body comprising an inlet and an outlet, a flow path extending between the inlet and the outlet through a pocket within the body;
- a seat having an annular ring extending from a lower surface of the seat, the seat located in the flow path and resting on a floor of the pocket, the annular ring of the seat engaging an annular groove formed in the floor of the pocket;
- a closure member configured to engage the seat and obstruct the flow path, the closure member comprising a fixed portion and a movable portion connected to the fixed portion;
- an actuator assembly coupled to the movable portion of the closure member to move the closure member from a closed state which obstructs the flow path to an open state which permits fluid flow;
- a radial flow guide located in the flow path, a plurality of flow passages extending through the radial flow guide, the plurality of flow passages defined by the radial flow guide and the seat, the radial flow guide compressed between the seat and the fixed portion of the closure member, the fixed portion of the closure member sealing an opening of the pocket and engaging an upper surface of the radial flow guide;
- and
- a longitudinal axis extending through the seat, the closure member, and the radial flow guide;
- an outlet manifold fluidly coupled to the outlet of the apparatus;
- and
- a processing chamber fluidly coupled to the outlet manifold.
9 more elements
An apparatus for controlling flow, the apparatus comprising:
- an inlet;
- an outlet;
- and
- a valve assembly, the valve assembly fluidly coupled between the inlet and the outlet, the valve assembly comprising:
- a body, the body comprising an inlet and an outlet, a flow path extending between the inlet and the outlet;
- a seat located in the flow path, the seat having a sealing lip extending from an upper surface of the seat;
- a closure member configured to engage the seat and obstruct the flow path, the closure member comprising a fixed portion directly coupled to the body and a movable portion which is configured to move with respect to the body;
- an actuator assembly coupled to the movable portion of the closure member to move the movable portion of the closure member from a closed state which obstructs the flow path to an open state which permits fluid flow;
- a radial flow guide located in the flow path, the radial flow guide comprising a plurality of grooves having an open profile, a plurality of flow passages at least partially defined by the grooves, the radial flow guide in direct contact with the upper surface of the seat, the fixed portion of the closure member in direct contact with the radial flow guide, the fixed portion of the closure member in direct contact with an upper surface of the radial flow guide, the radial flow guide sandwiched between the fixed portion of the closure member and the upper surface of the seat;
- and
- a longitudinal axis extending through the seat, the closure member, and the radial flow guide.
8 more elements
A system for processing articles, the system comprising:
- a fluid supply configured to supply a process fluid;
- an apparatus for controlling flow, the apparatus having an inlet, an outlet, and a valve assembly, the inlet of the apparatus fluidly coupled to the fluid supply and the valve assembly fluidly coupled between the inlet and the outlet, the valve assembly comprising:
- a body, the body comprising an inlet and an outlet, a flow path extending between the inlet and the outlet;
- a seat located in the flow path;
- a closure member configured to engage the seat and obstruct the flow path, the closure member comprising a diaphragm and a needle, the needle comprising a top end, a bottom end, a cylindrical portion and a grooved portion, the grooved portion extending from the bottom end to the cylindrical portion, and the grooved portion comprising a plurality of grooves;
- an actuator assembly coupled to the closure member to move the closure member from a closed state which obstructs the flow path to an open state which permits fluid flow;
- a radial flow guide, the radial flow guide having a plurality of grooves forming a portion of the flow path;
- and
- a longitudinal axis extending through the seat and the closure member;
- an outlet manifold fluidly coupled to the outlet of the apparatus;
- and
- a processing chamber fluidly coupled to the outlet manifold;
- wherein the plurality grooves of the needle and the plurality of grooves of the radial flow guide are equal in number and the plurality of grooves of the needle are rotationally aligned with the plurality of grooves of the radial flow guide;
- wherein the needle further comprises an annulus, the annulus extending radially from the cylindrical portion, the annulus comprising a face seal configured to engage the seat;
- and
- wherein the seat is configured to seal against both the cylindrical portion and the face seal when the closure member is in the closed state.
13 more elements
A valve assembly for use with a system for processing articles, the valve assembly comprising:
- a body, comprising:
- an inlet;
- an outlet;
- and
- a flow path extending between the inlet and the outlet;
- a seat located in the flow path;
- a closure member, comprising:
- a diaphragm;
- and
- a needle, comprising:
- a top end;
- a bottom end;
- a cylindrical portion;
- a grooved portion intermediate the bottom end and the cylindrical portion, wherein the grooved portion comprises a plurality of grooves;
- and
- an annulus extending radially from the cylindrical portion, wherein the annulus comprises a face seal configured to engage the seat;
- and
- an actuator coupled to the closure member, wherein the actuator is operable to move the closure member from a closed state in which the cylindrical portion and the face seal sealingly engage the seat and obstruct the flow path to an open state which permits fluid flow through the flow path;
- and
- a radial flow guide comprising a plurality of grooves, wherein the plurality grooves of the needle are rotationally aligned with the plurality of grooves of the radial flow guide.
17 more elements
Dependencies are inferred from the claim text.