Light source unit and heating treatment device
AssigneeUshio Denki Kabushiki Kaisha
InventorsTakafumi Mizojiri, Keita Kanazu, Takahiro Inoue
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Abstract
A light source unit of the present invention includes: a board, and a plurality of light source areas formed by a plurality of LED elements mounted on the board, wherein each of the light source areas is provided with a plurality of LED element groups connected in parallel, each of the LED element groups being composed of a plurality of the LED elements connected in series, and at least one of the light source areas is a single-wavelength light source area in which all of the LED elements emit light having substantially a same peak wavelength.
Claims14
A heating treatment device for heating a substrate to be treated, the heating treatment device comprising:
- a chamber for accommodating the substrate to be treated,
- a supporter for supporting the substrate to be treated in the chamber, and
- a light source unit further comprising:
- a board having a main surface, and
- a plurality of light source areas formed by a plurality of Light Emitting Diode (LED) elements mounted on the board, wherein
- each of the light source areas is provided with a plurality of LED element groups connected in parallel, each of the LED element groups being composed of a plurality of the LED elements connected in series,
- a first line connecting a first anode electrode with a second anode electrode and a second line connecting a first cathode electrode with a second cathode electrode, one end of each of the LED element groups being connected to the first line while the other end of each of the LED element groups being connected to the second line;
- a Zener diode connected to the first anode electrode and the first cathode electrode;
- and
- at least one of the light source areas is a single-wavelength light source area in which all of the LED elements emit light having substantially a same peak wavelength.
A heating treatment device for heating a substrate to be treated, the heating treatment device comprising:
- a chamber for accommodating the substrate to be treated,
- a supporter for supporting the substrate to be treated in the chamber, and
- a light source unit further comprising:
- a board having a main surface, and
- a plurality of light source areas formed by a plurality of Light Emitting Diode (LED) elements mounted on the board, wherein
- each of the light source areas is provided with a plurality of LED element groups connected in parallel, each of the LED element groups being composed of a plurality of the LED elements connected in series,
- a first line connecting a first anode electrode with a second anode electrode and a second line connecting a first cathode electrode with a second cathode electrode, one end of each of the LED element groups being connected to the first line while the other end of each of the LED element groups being connected to the second line;
- a Zener diode connected to the first anode electrode and the first cathode electrode;
- at least one of the light source areas is a single-wavelength light source area in which all of the LED elements emit light having substantially a same peak wavelength;
- and
- a plurality of small boards disposed on the board, wherein each of the light source areas is formed on a corresponding one of the small boards that are different with each other.
Dependencies are inferred from the claim text.