Back to results
US 12,218,260 B2Granted
Optical sensing device having inclined reflective surface
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Chiang Chang, Chia-Chan Chen
Life of this patent
Estimating the term…
Abstract
Disclosed are devices for optical sensing and manufacturing method thereof. In one embodiment, a device for optical sensing includes a substrate, a photodetector and a reflector. The photodetector is disposed in the substrate. The reflector is disposed in the substrate and spaced apart from the photodetector, wherein the reflector has a reflective surface inclined relative to the photodetector that reflects light transmitted thereto to the photodetector.
Claims12
A device for optical sensing, comprising:
- a substrate comprising a trench;
- a photodetector disposed in the substrate and next to the trench;
- a first dielectric layer disposed on the substrate and comprising a through hole connected to the trench;
- and
- a reflector disposed on the first dielectric layer and extending into the trench through a sidewall of the through hole, wherein the reflector exposes a side of the trench close to the photodetector.
2 more elements
A device for optical sensing, comprising:
- a substrate comprising a trench having symmetrical first and second sides;
- a photodetector disposed in the substrate and next to the second side;
- a first dielectric layer disposed on the substrate and comprising a through hole connected to the trench;
- and
- a reflector disposed on and in contact with the first side of the trench and exposing a portion of the second side of the trench.
2 more elements
Dependencies are inferred from the claim text.