FinFET device and method of forming same

A system, comprising:

• a plasma generation chamber operable to ignite a gas within into plasma products;
• a process chamber separated from the plasma generation chamber, wherein interior surfaces of the process chamber are coated in a metallic protective material;
• a showerhead within the process chamber, wherein the showerhead comprises a gas distribution plate at a bottom side of the showerhead;
• a primary conduit coupled to the plasma generation chamber and to a top side of the showerhead, wherein the primary conduit is configured to introduce plasma products from the plasma generation chamber into the showerhead at the top of the showerhead;
• a plurality of secondary conduits coupled to the plasma generation chamber and to a sidewall of the showerhead, wherein the plurality of secondary conduits are configured to transport plasma products from the plasma generation chamber into the showerhead at the sidewall of the showerhead;
• and
• a platform within the process chamber, wherein the platform is coated in the metallic protective material.

A plasma etching system, comprising:

• a hydrogen gas supply connected to a plasma generator chamber, wherein the plasma generator chamber is configured to generate plasma products from hydrogen gas, wherein the plasma products comprise hydrogen radicals and hydrogen ions;
• a showerhead comprising a plurality of distribution plates, wherein neighboring distribution plates are vertically separated, wherein each distribution plate comprises a plurality of apertures arranged in a plurality of concentric ring formations, wherein each distribution plate is electrically grounded, wherein the showerhead is configured to filter hydrogen ions out of the plasma products;
• a first conduit physically connected to a first surface of the showerhead, wherein the first conduit is configured to transport plasma products from the plasma generator chamber to the plurality of distribution plates within the showerhead;
• a second conduit physically connected to a second surface of the showerhead, wherein the second conduit is configured to transport plasma products from the plasma generator chamber to the plurality of distribution plates within the showerhead.