Semiconductor memory device and manufacturing method of the semiconductor memory device
AssigneeSK hynix Inc.
InventorsJun Hyuk Park, Kyung Min Park, Sung Gon Jin, Dong Won Choi
Life of this patent
Estimating the term…
Loading patent…
AssigneeSK hynix Inc.
InventorsJun Hyuk Park, Kyung Min Park, Sung Gon Jin, Dong Won Choi
Estimating the term…
There are provided a semiconductor memory device and a manufacturing method of the semiconductor memory device. The semiconductor memory device includes: a gate stack structure including a plurality of interlayer insulating layers and a plurality of conductive patterns, which are alternately stacked in a vertical direction; a dummy stack structure including a plurality of dummy interlayer insulating layers and a plurality of sacrificial layers, which are alternately stacked in the vertical direction, the dummy stack structure being disposed at a level at which the gate stack structure is disposed; a channel structure penetrating the gate stack structure; a memory layer disposed between each of the plurality of conductive patterns and the channel structure; and a dummy pillar penetrating a portion of the dummy stack structure with a length less than a length of the channel structure in the vertical direction.
A method of manufacturing a semiconductor memory device, the method comprising:
Dependencies are inferred from the claim text.