Integrated circuits having stacked transistors and backside power nodes
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Yu Lai, Chih-Liang Chen, Li-Chun Tien
Life of this patent
Estimating the term…
Loading patent…
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Yu Lai, Chih-Liang Chen, Li-Chun Tien
Estimating the term…
An integrated circuit device includes a first-type active-region semiconductor structure, a second-type active-region semiconductor structure stacked with the first-type active-region semiconductor structure, a front-side power rail in a front-side conductive layer, and a back-side power rail in a back-side conductive layer. The integrated circuit device also includes a source conductive segment intersecting the first-type active-region semiconductor structure at a source region of a transistor, a back-side power node in the back-side conductive layer, and a top-to-bottom via-connector. The source conductive segment is conductively connected to the front-side power rail through a front-side terminal via-connector. The top-to-bottom via-connector is connected between the source conductive segment and the back-side power node.
An integrated circuit device comprising:
An integrated circuit device comprising:
An integrated circuit device comprising:
Dependencies are inferred from the claim text.