Anti-fuse and fuse structures for improving the functionality of qubit circuits
AssigneeInternational Business Machines Corporation
InventorsVivekananda P. Adiga, Russell A. Budd, Charles Thomas Rettner, Stephen M. Gates
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Abstract
A method of constructing a superconducting switch includes depositing a thin sacrificial layer on top of a substrate. The sacrificial layer is patterned to remove portions of the sacrificial layer except at a first portion of the substrate. A superconducting metal layer is patterned on top of the substrate and on top of the sacrificial layer. The superconducting metal layer is patterned to form a superconducting metal line over the sacrificial layer. The patterned sacrificial layer is etched from under the superconducting metal line to release the metal line from the substrate.
Claims25
A method of constructing a superconducting switch, comprising:
- depositing a sacrificial layer on top of a substrate;
- patterning the sacrificial layer to remove portions of the sacrificial layer;
- depositing a superconducting metal layer, wherein a first portion of the superconducting metal layer is on top of the substrate, and wherein a second portion of the superconducting metal layer is on top of the sacrificial layer;
- patterning the superconducting metal layer to form a superconducting metal line over the sacrificial layer;
- and
- etching the patterned sacrificial layer from under the superconducting metal line to release the metal line from the substrate.
A method of constructing a superconducting switch, comprising:
- depositing a sacrificial layer on top of a substrate;
- patterning the sacrificial layer by etching away at least a portion of the sacrificial layer on a lateral first side and on a lateral opposite second side of the sacrificial layer, while maintaining a portion of the sacrificial layer that is between the lateral left side and the lateral opposite second side;
- depositing a superconducting metal layer on top of the substrate and the portion of the sacrificial layer that is between the lateral left side and the lateral opposite second side;
- providing a hard mask layer on top of the superconducting metal layer to create a pattern;
- removing a superconducting metal layer side wall on a third side and a fourth side between the lateral first side and the lateral opposite second side of the superconducting metal layer;
- removing the hard mask layer;
- and
- removing the sacrificial layer.
A method of fabricating a fuse structure, comprising:
- depositing a thin sacrificial layer on top of a substrate,
- patterning the sacrificial layer to remove portions of the sacrificial layer except at a first portion of the substrate;
- depositing a superconducting metal layer on top of the substrate and on top of the sacrificial layer by growing the superconducting metal layer with a compressive stress;
- patterning the superconducting metal layer to form a superconducting metal line over the sacrificial layer;
- and
- etching the patterned sacrificial layer from under the superconducting metal line to release the metal line from the substrate, wherein a portion of the superconducting metal line forms an air bridge having a separation from the substrate that is based on a compressive stress in the superconducting metal layer on top of the sacrificial layer.
A method of fabricating a fuse structure, comprising:
- depositing a sacrificial layer on top of a substrate;
- patterning the sacrificial layer by etching away at least a portion of the sacrificial layer on a lateral first side and on a lateral opposite second side of the sacrificial layer while maintaining a portion of the sacrificial layer between the lateral first side and the lateral opposite second side;
- depositing a superconducting metal layer on top of the substrate and the portion of the sacrificial layer that is between the lateral first side and the lateral opposite second side;
- providing a hard mask layer on top of the superconducting metal layer to create a pattern that leaves out a third side and a fourth side of the middle portion of the superconducting metal layer;
- removing a superconducting metal layer side wall on the third side and the fourth side between the lateral first side and the lateral second side of the superconducting metal layer;
- removing the hard mask layer;
- and
- removing the sacrificial layer, wherein the sacrificial layer is configured to stress the superconducting metal layer to facilitate a separation of the superconducting metal layer.
Dependencies are inferred from the claim text.