Semiconductor package and methods of forming the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsMeng-Che Tu, Wei-Chih Chen, Sih-Hao Liao, Yu-Hsiang Hu, Hung-Jui Kuo, Chen-Hua Yu
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsMeng-Che Tu, Wei-Chih Chen, Sih-Hao Liao, Yu-Hsiang Hu, Hung-Jui Kuo, Chen-Hua Yu
Estimating the term…
A method of forming a semiconductor device includes forming a first dielectric layer over a front side of a wafer, the wafer having a plurality of dies at the front side of the wafer, the first dielectric layer having a first shrinkage ratio smaller than a first pre-determined threshold; curing the first dielectric layer at a first temperature, where after curing the first dielectric layer, a first distance between a highest point of an upper surface of the first dielectric layer and a lowest point of the upper surface of the first dielectric layer is smaller than a second pre-determined threshold; thinning the wafer from a backside of the wafer; and performing a dicing process to separate the plurality of dies into individual dies.
A method of forming a semiconductor device, the method comprising:
A method of forming a semiconductor device, the method comprising:
A method of forming a semiconductor device, the method comprising:
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