Portable robotic semiconductor pod loader

A method, comprising:

• detecting, with at least one sensor, receipt of a semiconductor pod on a load port of a portable robotic semiconductor pod loader,
• wherein the portable robotic semiconductor pod loader is supported by a set of powered wheels that enable the portable robotic semiconductor pod loader to autonomously or semi-autonomously move in an unbounded manner in three or more directions of a plane, and
• wherein the load port is configured to rotate the semiconductor pod to orient an opening of the semiconductor pod with a staging area of a semiconductor processing tool and support the at least one sensor;
• causing a robot, of the portable robotic semiconductor pod loader, to align with the semiconductor pod provided on the load port;
• causing the robot to attach to the semiconductor pod;
• and
• causing the robot to provide the semiconductor pod from the load port to the staging area of the semiconductor processing tool.

A portable robotic semiconductor pod loader, comprising:

• a housing that is movable to position the portable robotic semiconductor pod loader adjacent to a staging area of a semiconductor processing tool, wherein a set of powered wheels supporting the housing enables the housing to autonomously or semi-autonomously move in an unbounded manner in three or more directions of a plane;
• a plurality of load ports supported by the housing, wherein one of the plurality of load ports is configured to:
• receive a semiconductor pod from an overhead automated material handling system,
• rotate the semiconductor pod to orient an opening of the semiconductor pod with the staging area of the semiconductor processing tool, and
• support at least two sensors that are configured to detect a presence or placement of the semiconductor pod on the one of the plurality of load ports;
• and
• a robot supported by the housing,
• wherein the robot is configured to provide the semiconductor pod from the one of the plurality of load ports to the staging area of the semiconductor processing tool.