Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

A method of manufacturing a semiconductor device, comprising:

• forming a film on a substrate for manufacturing the semiconductor device by performing a cycle that includes:
• supplying a first precursor to the substrate in a process chamber, the first precursor being a substance represented by a structural formula of SinCmH2n+2m+2 or SinCmH2n+2m where n is a positive integer and m is a positive integer, and not containing a chemical bond of nitrogen and hydrogen;
• supplying a second precursor to the substrate in the process chamber, the second precursor differing in molecular structure from the first precursor, being a substance represented by a structural formula of SijH2j+2 where j is a positive integer, and not containing the chemical bond of nitrogen and hydrogen;
• and
• supplying a pseudo catalyst to the substrate in the process chamber, the pseudo catalyst being a substance represented by a structural formula of YZ3 where Y is a Group 13 element and Z is a functional group selected from the group of hydrogen, a halogen group, an alkyl group, an amino group, an alkoxy group, and a hydroxy group, and not containing the chemical bond of nitrogen and hydrogen,
• wherein in the act of forming the film, a substance containing the chemical bond of nitrogen and hydrogen is not supplied to the substrate,
• wherein in the act of supplying the first precursor, a temperature of the substrate is set to a first temperature at which the first precursor is not pyrolized when the first precursor exists alone,
• wherein in the act of supplying the second precursor, a temperature of the substrate is set to a second temperature at which the second precursor is not pyrolized when the second precursor exists alone,
• wherein in each cycle, the act of supplying the first precursor and the act of supplying the pseudo catalyst are alternately performed,
• wherein in each cycle, one among the first precursor and the pseudo catalyst, which has been supplied earlier than the other one among the first precursor and the pseudo catalyst, is contained in the process chamber without being removed from the process chamber until the other one is supplied, and
• wherein in each cycle, the other one among the first precursor and the pseudo catalyst, which has been supplied later, reacts with the one among the first precursor and the pseudo catalyst, which has been supplied earlier, to decompose a part of the pseudo catalyst.