Magnet system, sputtering device and housing cover

A sputtering device comprising:

• a bearing device;
• and
• a magnet system comprising:
• a housing comprising a housing interior;
• a magnet holder arranged in the housing interior and rigidly attached to the housing;
• and
• a housing cover which, when assembled with the housing, forms a fluid-tight chamber, wherein the housing cover comprises:
• a gear stage;
• a generator;
• and
• a rotary coupling that couples the gear stage to the generator, wherein the magnet system is stationarily supported within a sputtering target by means of the bearing device.

A housing cover comprising:

• a first gear wheel;
• a generator;
• a flange penetrated by a through-hole, wherein the flange is positioned between the first gear wheel and the generator and has a sealing surface on a side facing the generator, wherein the generator is rigidly coupled to the flange on an end face of the flange;
• a second gear wheel coupled to the first gear wheel;
• and
• a rotary coupling configured to couple rotary motion of the second gear wheel to the generator through the through-hole, wherein the housing cover is a unitary assembly that may be mounted on or demounted from a housing.