High power cable for heated components in RF environment

A substrate support, comprising:

• an edge ring;
• a heater element arranged within the edge ring;
• a ceramic layer;
• at least one heating element arranged within the ceramic layer;
• and
• a cable configured to provide power from a power source to the heater element within the edge ring and the at least one heating element within the ceramic layer, wherein the cable includes, within the cable:
• a first plurality of wires connected to the heater element within the edge ring;
• a second plurality of wires connected to the at least one heating element within the ceramic layer;
• a filter module, wherein the first plurality of wires and the second plurality of wires are twisted together within the filter module;
• and
• an isolation device connected only to the first plurality of wires between the filter module and the heater element within the edge ring, wherein the isolation device is configured to compensate for a resonance frequency generated during operation of the heater element within the edge ring and the at least one heating element within the ceramic layer.