Sensor data compression in a plasma tool

A compression integrated system for compressing data, comprising:

• an analog-to-digital converter configured to receive a plurality of measurement signals from one or more sensors coupled to a radio frequency (RF) transmission path of a plasma tool, wherein the RF transmission path is from an output of an RF generator to an electrode of the plasma tool,
• wherein to receive the plurality of measurement signals, the analog-to-digital converter is configured to:
• receive a first electrical signal representing a first parameter associated with a first RF signal;
• receive a second electrical signal representing a second parameter associated with a second RF signal;
• wherein the analog-to-digital converter is configured to convert the plurality of measurement signals from an analog form to a digital form to sample data,
• wherein to convert the plurality of measurement signals, the analog-to-digital converter is configured to:
• sample the first electrical signal to output a first plurality of sample sets;
• and
• sample the second electrical signal to output a second plurality of sample sets;
• a data compression unit coupled to the analog-to-digital converter, wherein the data compression unit is configured to process the sample data to output compressed data,
• wherein to process the sample data, the data compression unit is configured to:
• determine a first maximum peak-to-peak value from the first plurality of sample sets;
• or
• determine a second maximum peak-to-peak value from the second plurality of sample sets;
• or
• determine a statistical frequency value from the first plurality of sample sets;
• or
• determine a statistical phase value from the first and second pluralities of sample sets;
• or
• a combination of two or more thereof;
• and
• a transmitter coupled to the data compression unit, wherein the transmitter is configured to send the compressed data to a controller for controlling the plasma tool.

A system for compressing data, comprising:

• a radio frequency (RF) generator coupled to an RF path, wherein the RF generator is configured to supply a first RF signal to the RF path;
• an RF sensor coupled to the RF path, wherein the RF sensor is configured to sense the first RF signal and a second RF signal to output a plurality of measurement signals;
• and
• a data integrated system coupled to the RF sensor to receive the plurality of measurement signals from the RF sensor, wherein to receive the plurality of measurement signals, the data integrated system is configured to:
• receive a first electrical signal representing a first parameter associated with the first RF signal;
• receive a second electrical signal representing a second parameter associated with the second RF signal,
• wherein the data integrated system is configured to convert the plurality of measurement signals from an analog form to a digital form to sample data, wherein to convert the plurality of measurement signals, the data integrated system is configured to:
• sample the first electrical signal to output a first plurality of sample sets;
• and
• sample the second electrical signal to output a second plurality of sample sets,
• wherein the data integrated system is configured to process the sample data to output compressed data, wherein to process the sample data, the data integrated system is configured to:
• determine a first maximum peak-to-peak value from the first plurality of sample sets;
• or
• determine a second maximum peak-to-peak value from the second plurality of sample sets;
• or
• determine a statistical frequency value from the first plurality of sample sets;
• or
• determine a statistical phase value from the first and second pluralities of sample sets;
• or
• a combination of two or more thereof, and
• wherein the data integrated system is configured to send the compressed data to a controller for controlling the system.