Chamber component condition estimation using substrate measurements

A substrate processing system comprising:

• a process chamber, to process a substrate that will comprise at least one of a film or a feature after the processing;
• one or more robot, to move the substrate from the process chamber to a substrate measurement system;
• the substrate measurement system, to measure a plurality of locations of at least one of the film or the feature on the substrate and generate a profile map of at least one of the film or the feature based on measurements of the plurality of locations;
• and
• a computing device, to:
• process data from the profile map using a first trained machine learning model, wherein the first trained machine learning model outputs a first chamber component condition estimation for a first chamber component of the process chamber;
• determine at least one of a deficiency or a degradation of the first chamber component based on the first chamber component condition estimation;
• and
• determine whether to perform maintenance on the first chamber component of the process chamber based on at least one of the deficiency or the degradation of the first chamber component.

A non-transitory computer readable medium comprising instructions that, when executed by a processing device, cause the processing device to perform operations comprising:

• receiving a thickness profile map of a film on a substrate, the substrate having been processed in a process chamber of a substrate processing system, and the thickness profile map having been generated by a substrate measurement system of the substrate processing system after the substrate was processed in the process chamber based on measurements of a plurality of locations on the substrate;
• processing data from the thickness profile map using a first trained machine learning model, wherein the first trained machine learning model outputs a first chamber component condition estimation for a first chamber component of the process chamber;
• determining at least one of a deficiency or a degradation of the first chamber component based on the first chamber component condition estimation;
• and
• determining whether to perform maintenance on the first chamber component of the process chamber based on at least one of the deficiency or the degradation of the first chamber component.