Exposure apparatus and method of manufacturing article

An exposure apparatus for performing scanning exposure on each of a plurality of shot regions in a substrate, comprising:

• a stage configured to hold the substrate;
• a driver configured to drive the stage;
• and
• a controller configured to control the scanning exposure on each of the plurality of shot regions while controlling the driver in accordance with a driving profile for driving the stage,
• wherein the driving profile includes a first constant acceleration section in which velocity of the stage is changed at a first constant acceleration in a first direction, a second constant acceleration section in which velocity of the stage is changed at a second constant acceleration in a second direction opposite to the first direction, and a connection section connecting the first constant acceleration section and the second constant acceleration section such that an acceleration of the stage in the connection section continuously changes,
• in a period including at least a part of the connection section, the scanning exposure on one shot region among the plurality of shot regions is performed.