US 12,216,273 B2Granted

Mirror unit

AssigneeHamamatsu Photonics K.K.

InventorsDaiki Suzuki, Tomoyuki Ide, Yuki Morinaga

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Abstract

In a mirror unit, a first wall portion is higher than a second wall portion. A window member is disposed on a top surface of the first wall portion and a top surface of the second wall portion and is inclined with respect to a mirror surface. When any one of first to fourth wall portions is set as a first reference wall portion, in a cross-section perpendicular to the first reference wall portion, a first line passing through a first end at a side of the first reference wall portion in the mirror surface and a first corner portion formed at the side of the first reference wall portion by an outer surface and a first side surface in the window member intersects the first wall portion. A wiring portion includes a portion extending inside a base and leads outside a frame member.

Claims15

Dependent claims

A mirror unit comprising:

a base including a main surface and a rear surface opposite to the main surface;
an optical scanning device including a movable portion and a mirror surface provided on the movable portion, the optical scanning device being disposed on a side of the main surface with respect to the base;
a frame member disposed on the side of the main surface with respect to the base so as to surround the mirror surface when viewed from a first direction;
a window member attached to the frame member so as to cover an opening of the frame member;
and
a wiring portion electrically connected to the optical scanning device,
wherein the wiring portion includes a penetrating portion extending inside the base so as to penetrate the base between the main surface and the rear surface,
wherein a length of the penetrating portion in the first direction is smaller than a thickness of a wall portion that forms the frame member, and
wherein the base includes a protruding portion located outside the frame member when viewed from the first direction, and the length of the penetrating portion in the first direction is smaller than a width of the protruding portion from the frame member to an end of the base.

6 more elements

A mirror unit comprising:

a base including a main surface and a rear surface opposite to the main surface;
an optical scanning device including a movable portion and a mirror surface provided on the movable portion, the optical scanning device being disposed on a side of the main surface with respect to the base;
a frame member disposed on the side of the main surface with respect to the base so as to surround the mirror surface when viewed from a first direction;
a window member attached to the frame member so as to cover an opening of the frame member;
and
a wiring portion electrically connected to the optical scanning device,
wherein the wiring portion includes a penetrating portion extending inside the base so as to penetrate the base between the main surface and the rear surface,
wherein a length of the penetrating portion in the first direction is smaller than a thickness of a wall portion that forms the frame member, and
wherein the base includes a protruding portion located outside the frame member when viewed from the first direction, the wiring portion further includes an extending portion connected to the penetrating portion at a side of the rear surface and extending on the base, and the extending portion extends from a connection part with the penetrating portion to reach the protruding portion at the side of the rear surface.

6 more elements

Dependencies are inferred from the claim text.

Facts

Application: 18/526,305Filed 1 Dec 2023 · continuation
Priority: JP 2019-01461030 Jan 2019
Published: US 2024/0094526 A121 Mar 2024
Granted: 4 Feb 2025
Term ends: Not estimatedThe source records don’t support an estimate.

Classification9 codes

G02B 27/0031
For optical correction, e.g. distorsion, aberration: for scanning purposes
G02B 5/08
Optical elements other than lenses: mirrors
G02B 26/0833
By means of one or more reflecting elements: the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
G02B 26/085
The reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD: the reflecting means being moved or deformed by electromagnetic means

Family

Application16/775,467Parent of this continuation · filed 29 Jan 2020
Application17/748,563Parent of this continuation · filed 19 May 2022
US 11,372,238 B2Parent of this continuation · filed 28 Jun 2022
Application18/103,835Parent of this continuation · filed 31 Jan 2023
US 11,592,662 B2Parent of this continuation · filed 28 Feb 2023
US 2024/0094526 A1Pre-grant publication · published 21 Mar 2024
US 11,874,458 B2Parent of this continuation
US 2020/0249470 A1Published application
US 2022/0283430 A1Published application
US 2023/0168491 A1Published application
US 12,216,273 B2This patent

From the US filing history. Foreign family members aren’t listed.

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