Dark-field confocal microscopic measurement apparatus and method based on vortex dichroism

An apparatus, comprising an array vortex light generation module, an array vortex light illumination module and an array dark-field confocal detection module;

• wherein the array vortex light generation module comprises, along a direction of light propagation, a laser, a half-wave plate, a quarter-wave plate, a one-dimensional scanning galvanometer, a scanning lens, a tube lens and an array vortex wave plate;
• wherein the array vortex light illumination module comprises, along the direction of light propagation, a non-polarizing beam splitter, an objective lens, a three-dimensional moving stage configured to support a sample,
• wherein the objective lens is configured to focus vortex illumination light beams onto the sample, and is configured to collect light from the sample;
• wherein the non-polarizing beam splitter is configured to direct the light from the sample into the array dark-field confocal detection module;
• and
• wherein the array dark-field confocal detection module comprises, along the direction of light propagation, an aperture diaphragm array, a focusing lens, a single-mode optical fiber and a photomultiplier tube (PMT) detector.