System for measuring thickness and physical properties of thin film using spatial light modulator

System for measuring the thickness and properties of a thin film using a spatial light modulator, the system comprising:

• a spatial light modulator configured to spatially modulate light from a light source and irradiate only a certain area of a sample;
• a first beam splitter configured to change a direction of the light modulated by the spatial light modulator and pass a part of a reflected light reflected from the sample;
• an objective lens configured to condense the light refracted by the first beam splitter to a certain area of the sample;
• a second beam splitter in which a part of the reflected light reflected from the sample is separated from the first beam splitter and changed after being incident;
• a first camera configured to acquire a surface image of the sample by the reflected light incident from the second beam splitter;
• an optical fiber equipped with a light receiving unit to receive reflected light that passed through a certain area of a back focal plane of the objective lens;
• a spectrometer configured to measure an intensity of light received from the optical fiber and output the measured intensity as an electrical signal;
• a first optical system disposed between the objective lens and the optical fiber and configured to transmit the image of the back focal plane of the objective lens to a preset position as it is;
• a second camera configured to acquire an image transmitted by the first optical system;
• and
• a third beam splitter disposed between the first optical system and the first camera and configured to separate the reflected light transmitted from the first optical system toward the optical fiber and the second camera.