Compliant tri-axial force sensor and method of fabricating the same

A compliant tri-axial force sensor comprising:

• a first electrode layer having an array of column electrodes in a first orientation;
• a second electrode layer having an array of column electrodes in a second orientation, which is orthogonal to the first orientation;
• a force-dependent active layer which is configured to change at least one property when subjected to a force and which is provided between the first electrode layer and the second electrode layer;
• at least one three dimensional bump arranged to transmit externally applied force through the force-dependent active layer;
• wherein at least one spacer is provided which is arranged to maintain a separation between two or more layers in the compliant tri-axial force sensor until an external force is applied;
• and
• wherein the at least one spacer takes the form of a binder provided between the force-dependent active layer and the first and/or second electrode layer, wherein the binder is provided in gaps between adjacent column electrodes and extends between the force-dependent active layer and respective edges of said adjacent column electrodes;
• or wherein the force-dependent active layer comprises a first active layer and a second active layer with a gap there-between, and wherein the at least one spacer is provided within the force-dependent active layer.