Miniature pressure/force sensor with integrated leads

A capacitive pressure sensor, comprising:

• a trace assembly, including:
• a spring metal diaphragm including a base portion and a moving portion;
• an insulating layer having a diaphragm portion on the moving portion of the diaphragm and a lead portion extending from the diaphragm;
• a conductor layer on the insulating layer including an electrode on the diaphragm portion and a trace extending from the electrode on the lead portion;
• and
• a metal can electrically and mechanically connected to the base portion of the spring metal diaphragm and defining a void adjacent the moving portion of the spring metal diaphragm.

A capacitive pressure sensor, comprising:

• an insulating layer including a diaphragm portion, a lead portion, and first and second opposite sides;
• a conductor layer on the first side of the insulating layer including:
• an electrode on the diaphragm portion;
• a first trace extending from the electrode on the lead portion;
• and
• a second trace on the lead portion;
• a metal spacer member on the second side of the insulating layer around the electrode;
• a conductive via electrically connecting the second trace to the metal spacer member;
• and
• a metal electrode member mechanically and electrically joined to the metal spacer member.