Differential-pressure-based flow meters
AssigneeLam Research Corporation
InventorsJohn Folden Stumpf, Karl Frederick Leeser
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AssigneeLam Research Corporation
InventorsJohn Folden Stumpf, Karl Frederick Leeser
Estimating the term…
Various embodiments include apparatuses and methods to form the apparatus. In one embodiment, the apparatus is a flow meter having inlet and outlet portions for transporting a fluid along a flow path. A flow-restrictor element is formed within the flow path to impart a pressure drop to the fluid. A flow sensor has a first surface of the flow sensor in direct fluid communication with fluid flowing upstream of the flow-restrictor element and a second surface, on a portion of the flow sensor opposite to the first surface, in direct fluid communication with fluid flowing downstream of the flow-restrictor element. The flow sensor senses a differential pressure in the fluid due to the at least one flow-restrictor element. Other apparatuses and systems are disclosed.
A flow meter, comprising:
A flow meter, comprising:
A flow meter, comprising:
Dependencies are inferred from the claim text.