Methods and systems of optical inspection of electronic device manufacturing machines

An inspection device capable of being transferred by a robot blade into a processing chamber, the inspection device comprising:

• one or more optical sensors, wherein each of the one or more optical sensors comprises a light source to generate sensing light and a light detector to detect light reflected from a plurality of locations of a target located within the processing chamber, and wherein the one or more optical sensors output, to a processing device, a plurality of time-mapped signals representative of a state of the plurality of locations of the target;
• and
• a controller configured to:
• map each of the plurality of time-mapped signals to a respective location of the plurality of locations of the target using a speed of the robot blade.