Apparatuses and method for oriented deposition
AssigneeCanatu Finland Oy
InventorsIlkka Varjos, Anton Sergeevich Anisimov, Bjørn Fridur Mikladal, Dewei Tian
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AssigneeCanatu Finland Oy
InventorsIlkka Varjos, Anton Sergeevich Anisimov, Bjørn Fridur Mikladal, Dewei Tian
Estimating the term…
Apparatuses and a method for gas phase deposition of high aspect ratio molecular structures, HARM-structures, are presented. The first aspect relates to an apparatus configured for oriented gas phase deposition of HARM-structures on a filter. The second aspect relates to an apparatus configured for oriented gas phase deposition of HARM-structures on a substrate. A system comprising multiple apparatuses according to the second aspect is also presented. Elements of the apparatuses are arranged to create a laminar flow of gas comprising HARM-structures in the deposition area, and to direct this flow at least partially parallel to the deposition area. Another aspect of the invention is a method for oriented deposition of HARM-structures, suitable for deposition both on a filter and a substrate.
An apparatus, comprising:
An apparatus, comprising:
A method for oriented deposition of HARM-structures, the method comprising:
A method for oriented deposition of HARM-structures, the method comprising:
Dependencies are inferred from the claim text.