Supply method, supply device, and cleaning agent

A supply device comprising:

• a gas-liquid supply mechanism configured to supply a liquid substance containing foam to one or more of openings formed on a surface of a sample,
• wherein the gas-liquid supply mechanism is configured to freely switch between a gas-liquid contact state in which the sample is in contact with the liquid substance and a gas-liquid contact retraction state in which the sample is retracted from contacting the liquid substance repeatedly;
• wherein the gas-liquid supply mechanism includes:
• a tank;
• a lid configured to freely close and open formed in the tank;
• a filter configured to partition a containing space of the tank into a first containing space and a second containing space;
• and
• a movement mechanism configured to move the tank to perform at least one of a reciprocation motion, a rotational motion, and an orbital motion;
• the filter is capable of allowing the liquid substance to pass through and controlling passing of the sample,
• the sample is disposed on one side of the containing space partitioned by the filter,
• the liquid substance reciprocates between the first containing space and the second containing space through the filter, in accordance with impartment of an external force, and
• the reciprocation of the liquid substance causes switching between the gas-liquid contact state and the gas-liquid contact retraction state;
• wherein the cleaning agent has fluidity in a range of a melting point that is higher than or equal to that of the support material and lower than a melting point of the model material, in which, the melting point of the support material is lower than that of the model material,
• the supply device further comprises a temperature adjustment mechanism capable of adjusting a temperature such that the cleaning agent has the fluidity,
• the temperature adjustment mechanism includes:
• an external tank capable of containing the tank, the liquid substance, and the sample;
• and
• a temperature adjustment unit capable of adjusting a temperature of an internal space of the external tank,
• the movement mechanism includes:
• a shaft;
• a driving device capable of rotating the shaft;
• and
• a power transmission mechanism capable of converting a rotational motion of the shaft into at least one of the reciprocation motion, the rotational motion, and the orbital motion of the tank,
• the driving device is disposed outside the external tank, and
• the shaft is communicated with a hole formed in the external tank.