Increased deposition efficiency via dual reactor system

A method for depositing Parylene onto a substrate, comprising:

• operating a first pyrolysis chamber at a first set of parameters to cause cracking of dimers into monomers at the first set of parameters, wherein the monomers at the first set of parameters are a precursor to a first Parylene;
• operating a second pyrolysis chamber at a second set of parameters to cause cracking of dimers into monomers at the second set of parameters, wherein the monomers at the second set of parameters are a precursor to a second Parylene, wherein the first Parylene and the second Parylene are a same Parylene, wherein the first set of parameters includes a longer residence time than the second set of parameters, and wherein the first set of parameters includes a lower temperature than the second set of parameters;
• mixing the monomers at the first set of parameters with monomers at the second set of parameters together in a third pyrolysis chamber before entering a deposition chamber, wherein, within the third pyrolysis chamber, over-cracked monomer from the first pyrolysis chamber assists in cracking under-cracked dimer from the second pyrolysis chamber;
• and
• polymerizing the mixture as a protective coating in the deposition chamber.