Preparation method of polymer-derived high-temperature ceramic film sensor

A preparation method of a polymer-derived ceramic thin film sensor, the method comprising:

• step 1, spray printing sensitive layer precursor liquid on an alumina substrate, and heating and curing the sensitive layer precursor liquid to obtain a sensitive layer precursor layer;
• wherein the sensitive layer precursor fluid is obtained by mixing precursor fluid with conductive powder;
• step 2, spray printing protective layer precursor liquid on the sensitive layer precursor layer, and heating and curing the protective layer precursor liquid to obtain a protective layer precursor layer;
• wherein the protective layer precursor fluid is obtained by mixing TiB2 nano-powder, insulating powder and the precursor fluid;
• step 3, spot-coating a solder at a pin of the sensitive layer where a platinum wire is placed in advance, applying an alumina cap on the solder to make the alumina cap cover a part of the protective layer and all of the solder, and heating and curing the solder to obtain a device;
• and
• step 4, heating the device obtained in the step 3 to a temperature of 800-1100° C. at a heating rate of 3-10° C./min, and keeping the temperature for 1-3 hours to obtain the polymer-derived ceramic thin film sensor.