3D nanochannel interleaved devices

A method comprising:

• forming a pattern of mandrels and spacers on a substrate, wherein the mandrels and the spacers are arranged in an alternating fashion, and wherein the pattern comprises a first portion, a second portion, and a third portion;
• forming first gaps between the spacers located in the first portion of the pattern;
• forming second gaps between the mandrels located in the third portion of the pattern;
• forming first electrodes in the first gaps;
• forming second electrodes in the second gaps;
• and
• selectively removing the second portion of the pattern thereby forming a channel, wherein the first electrodes and the second electrodes are offset from one another across the channel.

A method comprising:

• forming a first series of electrodes in a first region, wherein the electrodes in the first series of electrodes are separated from one another by a series of spacers;
• forming a second series of electrodes in a second region, wherein the electrodes in the second series of electrodes are separated from one another by a series of mandrels;
• and
• forming a channel between the first series of electrodes in the first region and the second series of electrodes in the second region, wherein the electrodes in the first series of electrodes are offset across the channel from the electrodes in the second series of electrodes.